Event Technical Meeting Sponsored By - EDFAS Lone Star Chapter and Dallas IEEE
Reliability Society
Presenter: Mr. Roger Stierman
Presentation: Advanced Gas Injection to Turbocharge your FIB/SEM Applications
Date: Wednesday, April 28, 2010
Time: Social - 6:00pm - 6:40pm (food and drink will be provided)
General business meeting - 6:40pm - 6:55pm
Technical presentation - 7:00pm
Location: Holiday Inn Express, 700 Central Parkway East, Plano TX 75074.
Sponsors: EDFAS Lone Star Chapter
For additional information go to one of the following web sites;
EDFAS Lone Star Chapter -
http://www.lonestar-edfas.org/index.htmlPresentation:
Advanced Gas Injection to Turbocharge your FIB/SEM Applications
Many owners of focused ion beam (FIB) and scanning electron microscopes (SEM) are using pattern generators on their systems for direct beam writing from beam-gas interactions. With the wide variety of applications, from the building of nanoscale structures to TEM lift-out sample preparation, the optimization of beam & gas variables is an important and complex task. Recent technological improvements have resulted in gas injection hardware that maximizes operator control and flexibility on the FIB or SEM hardware. Comparisons will be presented on deposition rates with various precursors, changes in gas delivery amounts, and other factors impacting the beam-gas interaction process to fabricate the materials for research, development, and process control monitoring.
