[SI-LIST] Re: Wafer probing on Al pads
- From: "Prairie, Jason F." <prairie.jason@xxxxxxxx>
- To: garyo@xxxxxxxxxxxx, mike_bihan@xxxxxxxxxxxx, frankb@xxxxxxxxxxxxx
- Date: Wed, 12 Feb 2003 11:17:24 -0600
Ill agree with Gary on this one. We have had good success with Tungsten =
tips
on Al pads.
Jason
> -----Original Message-----
> From: Gary Otonari [mailto:garyo@xxxxxxxxxxxx]=20
> Sent: Wednesday, February 12, 2003 1:58 AM
> To: mike_bihan@xxxxxxxxxxxx; frankb@xxxxxxxxxxxxx
> Cc: 'List` Si'
> Subject: [SI-LIST] Re: Wafer probing on Al pads
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>=20
>=20
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> Standard Beryllium-Copper tips are great for durability, but=20
> don't work well on Al pads. We use Tungsten tip probes for=20
> this application. GGB sells their popular 40A probes in both=20
> BeCu and Tungsten: www.ggb.com
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> -- Gary Otonari
>=20
> -----Original Message-----
> From: si-list-bounce@xxxxxxxxxxxxx=20
> [mailto:si-list-bounce@xxxxxxxxxxxxx]On Behalf Of Bi Han
> Sent: Tuesday, February 11, 2003 8:25 PM
> To: frankb@xxxxxxxxxxxxx
> Cc: List` Si
> Subject: [SI-LIST] Re: Wafer probing on Al pads
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> We have the same problem.
> Cascade will deliver the "infinity probe" in 2 months to us.=20
> Theoratically, it should have good performance. I have=20
> another concern that whether the novel probe will be damaged=20
> easily? Averagly, how many times can this kind of probe if =20
> it is properly used? B.H.
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> Brian Frank <frankb@xxxxxxxxxxxxx> wrote:
> Hi,
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> I'm doing on-wafer measurements of 10-20 GHz silicon=20
> circuits. I've found that the repeatability of the=20
> measurements is poor due to aluminum oxide formation on the pads.
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> Cascade Microtech and Karl Suss both offer probes which they=20
> claim work well with aluminum pads (the Infinity Probe, and=20
> the "Z" probe, respectively). Does anyone have experience=20
> with either of these probes, or have other suggestions for=20
> other suitable wafer probes?
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> Thanks,
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> Brian
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> --
> B. Frank, P.Eng.
> Assistant Professor
> Department of Electrical and Computer Engineering
> Tel: 613.533.3063 |||| F: 613.533.6615
>=20
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