[SI-LIST] Re: Wafer probing on Al pads
- From: "Gary Otonari" <garyo@xxxxxxxxxxxx>
- To: <mike_bihan@xxxxxxxxxxxx>, <frankb@xxxxxxxxxxxxx>
- Date: Tue, 11 Feb 2003 23:58:26 -0800
Standard Beryllium-Copper tips are great for durability, but don't work well
on Al pads. We use Tungsten tip probes for this application. GGB sells
their popular 40A probes in both BeCu and Tungsten: www.ggb.com
-- Gary Otonari
-----Original Message-----
From: si-list-bounce@xxxxxxxxxxxxx
[mailto:si-list-bounce@xxxxxxxxxxxxx]On Behalf Of Bi Han
Sent: Tuesday, February 11, 2003 8:25 PM
To: frankb@xxxxxxxxxxxxx
Cc: List` Si
Subject: [SI-LIST] Re: Wafer probing on Al pads
We have the same problem.
Cascade will deliver the "infinity probe" in 2 months to us. Theoratically,
it should have good performance.
I have another concern that whether the novel probe will be damaged easily?
Averagly, how many times can this kind of probe if it is properly used?
B.H.
Brian Frank <frankb@xxxxxxxxxxxxx> wrote:
Hi,
I'm doing on-wafer measurements of 10-20 GHz silicon circuits. I've found
that the repeatability of the measurements is poor due to aluminum oxide
formation on the pads.
Cascade Microtech and Karl Suss both offer probes which they claim work
well with aluminum pads (the Infinity Probe, and the "Z" probe,
respectively). Does anyone have experience with either of these probes,
or have other suggestions for other suitable wafer probes?
Thanks,
Brian
--
B. Frank, P.Eng.
Assistant Professor
Department of Electrical and Computer Engineering
Tel: 613.533.3063 |||| F: 613.533.6615
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