[SI-LIST] rf measurements

Hi,
I had a question regarding the rf measurements I am doing on some mems switches.
1)Does the chuck of the probe-station need to be grounded while doing the 
measurements?
I get different results when the chuck is grounded and not-grounded.The results 
seem to be better when the chuck is not grounded.
I am using coplanar probes and have an rf signal with a dc bias.
2)Also, what I have obserevd is that, grounding the chunk momentarily, when 
placing the probes onto the bond pads, eliminates a slight switch movement I 
have, when the same is not done.
Also, after the bias volatge is removed, the switch comes back up immediately 
if 
I ground the chuck and lift the probes.If the chuck is not grounded, the switch 
stays stuck for a longer time before coming back to orignal posistion.

I believe it's not a stiction problem, but more of a charge build-up and/or 
grounding problem.

I would appreciate any suggestions.

Thanks in advance.


 
Kaustubh Bhate


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