[SI-LIST] Re: Wafer probing on Al pads

We have the same problem.
Cascade will deliver the "infinity probe" in 2 months to us. Theoratically, it 
should have good performance.
I have another concern that whether the novel probe will be damaged easily?  
Averagly, how many times can this kind of probe if  it is properly used?  
B.H.
 
 Brian Frank <frankb@xxxxxxxxxxxxx> wrote:
Hi,

I'm doing on-wafer measurements of 10-20 GHz silicon circuits. I've found 
that the repeatability of the measurements is poor due to aluminum oxide 
formation on the pads.

Cascade Microtech and Karl Suss both offer probes which they claim work 
well with aluminum pads (the Infinity Probe, and the "Z" probe, 
respectively). Does anyone have experience with either of these probes, 
or have other suggestions for other suitable wafer probes?

Thanks,

Brian

-- 
B. Frank, P.Eng.
Assistant Professor
Department of Electrical and Computer Engineering
Tel: 613.533.3063 |||| F: 613.533.6615

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