[SI-LIST] Wafer probing on Al pads

Hi,

I'm doing on-wafer measurements of 10-20 GHz silicon circuits. I've found 
that the repeatability of the measurements is poor due to aluminum oxide 
formation on the pads.

Cascade Microtech and Karl Suss both offer probes which they claim work 
well with aluminum pads (the Infinity Probe, and the "Z" probe, 
respectively). Does anyone have experience with either of these probes, 
or have other suggestions for other suitable wafer probes?

Thanks,

Brian

-- 
B. Frank, P.Eng.
Assistant Professor
Department of Electrical and Computer Engineering
Tel: 613.533.3063  ||||  F: 613.533.6615

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