[bitlug] SERC: MEMS lecture series, Feb 19 - 24 March, 2004 (fwd)

  • From: Peeyush Prasad <peeyush@xxxxxxxxxx>
  • To: bitlug@xxxxxxxxxxxxx, <bitcompsci02@xxxxxxxxxxxxxxx>
  • Date: Thu, 12 Feb 2004 19:28:22 +0530 (IST)


-- P

SERC wishes to announce a series of lectures on one of the emerging
research areas known as MEMS to be given by Sayanu Pamidighantam at SERC,
room number:102.

Whoever is interested to attend is welcome.

The field of MEMS (MicroElectroMechanicalSystems) can be divided into six
different areas of research based on the application examples. These are
Inertial-MEMS, Optical-MEMS, RF-MEMS, Fluidic-MEMS, Power-MEMS, and
Bio-MEMS respectively.

Irregardless of the target application some of the developmental tasks
are
common to the MEMS devices. These are

1. Fabricaiton Technologies
2. Actuation/Excitation and Sensing/detection mechanisms
3. Packaging of MEMS
4. Some basic characterization/testing techniques
5. Methodologies for modeling and simulation of the devices

There are ofcourse areas that fall outside thi! s common overlap regions.
Like for example, the operation of the device in each of these six
sub-areas is based on physical, chemical, optical, biological and
electrical principles. Based on these principles, some modifications or
changes to the steps 1 to 4 should be introduced in the overall
developmental cycle of the device.

The various developmental phases in MEMS have roots in different
disciplines. In order to sucessfully realize a MEMS device a methodology
known as Integrated Design Approach or IDEA is required wherein different
ingredients of the development such as the design, the fabrication, the
packaging and the characterization techniques are foreseen during the
initial design phase. It is clear that by following the approach of IDEA
longer developmental time is needed, but in the long run will result in
fruitful and successful products.

Keeping in line with the methodology of IDEA, the following topics will
becovered in this current lecture series on MEMS.

1. Introduct ion to MEMS. fabrication technologies for MEMS (Feb 19th
2004)
2. Actuation/Excitation and Sensing/Detection mechanisms in MEMS (Feb
25th
2004)
3. Principle of operation of different selected MEMS devices (atleast one
from each of the six sub-areas) (3rd March 2004)
4. RF-MEMS components, sub-systems, and systems (10th March 2004)
5. Packaging technologies/ schemes for MEMS (17th March 2004)
6. Chracterization techniques for MEMS (24th March 2004)







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  • » [bitlug] SERC: MEMS lecture series, Feb 19 - 24 March, 2004 (fwd)